The micro and nanofabrication facility consists of a 350m2 cleanroom and over thirty tools for the deposition, growth, patterning and etching of advanced materials. The facility supports faculty and students from all departments and external stakeholders through an established proposal review process. The facility has four bays. The first is a class 1000-metrology bay, followed by a second-class 1000 deposition and etching bay. The last two bays are class 100 bays that house several etch, deposition, growth, lithography and wet processing tools. Regular scheduled trainings are on offer for the various items of equipment and processing techniques. Trainings given each week, and start with a mandatory pre-requisite, cleanroom safety training and orientation session, which transitions to hands-on training on the tools and techniques. Rules of operation, equipment use and personal protective equipment (PPE) are discussed at each training session.
- No user or project is more important than the safety of the users/staff or the laboratory itself.
- Every user of the laboratory will respect the laboratory, its equipment and every other user.
- No user will operate any equipment within the laboratory without having been properly trained and signed off on that item of equipment and/or process.
- Every user of the laboratory will utilize the proper Personal Protective Equipment (PPE) when operating equipment or processing wafers with hazardous chemicals.
- Safety glasses shall be worn at all times.
- No user shall work with chemicals in the laboratory without another user present.
- No chemical or process may be left unattended without proper labeling and user identification.
- Any workspace shall be returned to a neat and clean status prior to a user leaving that workspace.
- Any user assigned to a laboratory task shall be responsible for the completion of that task.
- If any individual cannot resolve an issue relating to the laboratory in a professional, courteous and respectful manner, it will be brought to the attention of the Research Laboratories Director.
Online EHS training requirements for the Micro/nanofabrication facility:
- Cleanroom induction
- Lab Waste Management
- Emergency Response & Preparedness
- PPE
- Electrical Safety
- EHS Risk Assessment
- Basic Fire Safety
- Explosive Peroxide forming Chemicals
- Hydrogen Sulphide Safety Awareness
- Lab Ventilation/Chemical Fume Hood
- Compressed gas safety
- Handling of cryogenic substances
- Handling of Flammable and Combustible
- Chemical Safety and Industrial Hygiene
- Safety Shower and Eyewash Station
- Laser Safety
Cleanroom
Undercroft Building 1A
Masdar City campus, Masdar City
Dr. Calvyn Travis Howells
Core Lab Specialist
T +971 2 312 5722
Dr. Ricardo Janeiro
Core Lab Engineer
T +971 2 312 5722